000			00298nam a2200133Ia 4500
008			211209s2016 xx 000 0 und d
020			_a9788131764756.00
041			_aeng
100			_aLIU
245			_aFOUNDATIONS OF MEMS
250			_a2ND ED
260			_aNOIDA _bPEARSON _c2016
300			_a576
999			_c86176 _d86176