000 00311nam a2200109Ia 4500
008 211209s2015 xx 000 0 und d
041 _aeng
082 _a620.44 OHR
100 _aOHRING,MILTON
245 _aMATERIALS SCIENCE OF THIN FILMS: DEPOSITION AND STRUCTURE
260 _aNEWDELHI
_bACADEMIC PRESS INC
_c2015
999 _c83363
_d83363