000 00288nam a2200121Ia 4500
008 211209s9999 xx 000 0 und d
020 _a9780070487093
041 _aeng
082 _a621.381 HSU
100 _aHSU
245 _aMEMS AND MICROSYSTEMS DESIGN AND MANUFACTURE
260 _bTMH
999 _c78525
_d78525