000 00265nam a2200121Ia 4500
008 211209s9999 xx 000 0 und d
020 _a9788131764756
041 _aeng
082 _a621.3 LIU
100 _aLIU
245 _aFOUNDATIONS OF MEMS
260 _bPEARSON
999 _c78014
_d78014