000 00308nam a2200121Ia 4500
008 211209s2002 xx 000 0 und d
020 _a0070487093
041 _aeng
100 _aRAN HSU, TAI
245 _aMEMS AND MICROSYSTEMS: DESIGN AND MANUFACTURE
260 _aNEW DELHI
_bTMH
_c2002
300 _aXII-436
999 _c60351
_d60351