000 00337nam a2200133Ia 4500
008 211209s2004 xx 000 0 und d
020 _a81-8128-202-7
041 _aeng
082 _a620.5 O04
100 _aFUJITA H
245 _aMICROMACHINES AS TOOLS FOR NANOTECHNOLOGY
260 _aNEW DELHI
_bSPRINGER-VERLOG
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300 _a211
999 _c58113
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