000 00343nam a2200121Ia 4500
008 211209s1982 xx 000 0 und d
041 _aeng
082 _a621.3815 N82 ELL
100 _aELLIOT, DAVID J
245 _aINTEGRATED CIRCUIT FABRICATION TECHNOLOGY
260 _aNEW YORK
_bMCGRAW-HILL PUBLISHING COMPANY LIMITED
_c1982
300 _a405
999 _c22118
_d22118