| 000 | 00343nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 211209s1982 xx 000 0 und d | ||
| 041 | _aeng | ||
| 082 | _a621.3815 N82 ELL | ||
| 100 | _aELLIOT, DAVID J | ||
| 245 | _aINTEGRATED CIRCUIT FABRICATION TECHNOLOGY | ||
| 260 |
_aNEW YORK _bMCGRAW-HILL PUBLISHING COMPANY LIMITED _c1982 |
||
| 300 | _a405 | ||
| 999 |
_c22118 _d22118 |
||