000 00296nam a2200121Ia 4500
008 211209s1979 xx 000 0 und d
041 _aeng
082 _a621.381 52 N78 FOU
100 _aFOURCHILD
245 _aSEMICUNDUCTOR AND INTEGRATED CIRCUIT FABRICATION
260 _c1979
300 _a209
999 _c13941
_d13941