000 00326nam a2200133Ia 4500
008 211209s2015 xx 000 0 und d
020 _a9780070487033
041 _aeng
082 _a621.381
100 _aHSU-TAI-RAN
245 _aMEMS AND MICROSYSTEMS
260 _aNEW DELHI
_bMCGRAW-HILL
_c2015
300 _aXII XII + 436
999 _c102841
_d102841