TY  - BOOK
AU  - BHAT, NAVAKANTA
TI  - MEMS AND APPLICATIONS-IEEE TENCON-2003 
U1  - 621.381 O 03 BHA/PAM 
PY  - 2003///
CY  - BANGALORE
PB  - DEPT.OF ELECTRICAL ENGG. IISC.
ER  -